Intelligent autonomous control of representative unmanned systems, such as UAV, unmanned vehicle, unmanned ship, robot, is the research hotspot in the field of automatic control, and is the core technology to improve the autonomy and intelligent level of unmanned system. 

   Autonomous navigation technology uses the corresponding autonomous navigation system to obtain the position, speed and attitude information of the unmanned system, which is an essential technical guarantee for the realization of intelligent autonomous control of unmanned system. Among many navigation technologies, such as radio navigation, terrain matching navigation, inertial navigation, satellite navigation, magnetic navigation and visual navigation, the inertial navigation technology which does not rely on external information is the most powerful technical means to realize autonomous navigation of unmanned system. 

   MEMS inertial navigation technology based on MEMS inertial sensor is an important branch of inertial navigation technology. Its system has the advantages of low cost, small size, low power consumption and strong impact resistance. Therefore, the research on MEMS inertial sensor and its navigation technology is of great significance to the rapid development of autonomous navigation technology of unmanned system and to meet its increasing application requirements.